| 摘要 |
PROBLEM TO BE SOLVED: To provide a force sensor unit capable of improving detection accuracy without being affected by change in temperature. SOLUTION: The force sensor unit includes a detecting section for detecting an outer force and a buffer device 4' for suppressing an outer force and applying it to the detecting section. The detecting section is constituted by a force sensor 1 for detection of an outer force capable of detecting the outer force and change in temperature and a force sensor 1' for compensation of temperature capable of detecting change in temperature. COPYRIGHT: (C)2010,JPO&INPIT |
