发明名称 POSTURE ADJUSTING DEVICE AND BONDING DEVICE, AND POSTURE ADJUSTING METHOD AND BONDING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To adjust the posture of a posture object body with high precision through simple configurations. Ž<P>SOLUTION: A posture adjusting device is provided with a displacement means for subjecting objects 2, 13 to be displaced to: parallel movement in a predetermined first translation direction (for example, a Y-axial direction); and rotational movement around a predetermined first axis of rotation orthogonal to the first translation direction, for example, rotational movement around a predetermined axis of rotation along, for example, a Z-axial direction. Amounts of parallel movement of the objects 2, 13 to be displaced by the displacement means in the first translation direction and angles of rotation around the first axis of rotation are adjusted so that movement of the objects 2, 13 to be displaced by combination of the parallel movement and rotational movement is nearly equivalent to rotational movement around a predetermined first target center axis of rotation being parallel to or meeting the first axis of rotation. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010027728(A) 申请公布日期 2010.02.04
申请号 JP20080184900 申请日期 2008.07.16
申请人 NEC CORP 发明人 SHIMODA KAZUYA;KURIHARA MITSURU;KANEMOTO CHIKANORI;YAMAMOTO KEISUKE
分类号 H01L21/60 主分类号 H01L21/60
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