发明名称 SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device capable of preventing degradation of a drive characteristic of a peripheral transistor. Ž<P>SOLUTION: As shown in Fig.2, this semiconductor device includes: a semiconductor substrate; an element isolation film formed to surround an element formation region AA of the semiconductor substrate; and a transistor arranged in the element formation region. The transistor includes: first and second diffusion layers formed in the element formation region; a channel region formed between the first and second diffusion layers; a gate insulation film formed on a surface of the channel region; and a gate electrode 4 arranged on the gate insulation film. A gate length LG2 of the gate electrode in a boundary part C between the element formation region AA and the element isolation film is larger than a gate length G1 of the gate electrode at the center part of the element formation region. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010027921(A) 申请公布日期 2010.02.04
申请号 JP20080188902 申请日期 2008.07.22
申请人 TOSHIBA CORP 发明人 SUZUKI ATSUHIRO
分类号 H01L29/78;H01L21/8234;H01L21/8247;H01L27/088;H01L27/10;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L29/78
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