| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a positive electrode of a thin-film battery in which utilization efficiency of the positive electrode can be improved, and to provide the manufacturing method of a thin-film battery. <P>SOLUTION: The manufacturing method of the thin-film battery has a membrane manufacturing process in which a positive electrode material is film-formed and the positive electrode active material membrane 83 is formed, an annealing process in which the positive electrode active material membrane 83 is annealed, a lithium ion introduction process in which lithium ions 87 are introduced into the positive electrode active material membrane 83 after the annealing process, and a reverse sputtering process in which reverse sputtering is carried out on the positive electrode active material membrane 83 and edging is carried out after the lithium ions 87 are introduced. <P>COPYRIGHT: (C)2010,JPO&INPIT |
