| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibrating gyro element suppressing driving vibration leaking to a base part and preventing detection errors in angular velocities, and also to provide a support structure of the vibrating gyro element and a gyro sensor. <P>SOLUTION: The element includes, in the same plane, the base part 10, a pair of vibrating arms 11a, 11b for detection linearly extended from the base part 10 to both sides, a pair of connecting arms 13a, 13b extended from the base part 10 to both sides in directions perpendicular to the vibrating arms 11a, 11b for detection, each pair of vibrating arms 14a, 14b, 15a, 15b for drive extended from the tip parts of each connecting arm 13a, 13b to both sides perpendicularly to the connecting arm 13a, 13b, four beams 20a, 20b, 21a, 21b extended from the base part 10, and supporting parts 22a, 22b, 23a, 23b each connected to the tip of each beam 20a, 20b, 21a, 21b. The beams 20a, 20b, 21a, 21b are first extended from the base part 10 in directions approximately perpendicular to the extending directions of the vibrating arms 14a, 14b, 15a, 15b for drive. <P>COPYRIGHT: (C)2010,JPO&INPIT |
