| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a drawing method and a drawing device with improved drawing accuracy on an edge part of a pattern. <P>SOLUTION: The length in the X-direction of a stripe pattern L1 is larger than the length in the X-direction of a stripe pattern L2. When a region R where the aiming position PT of a laser beam is shifted (an aim shift region) is between the stripe patterns L1 and L2, and when the aim shift region R overlaps the stripe pattern L1, the travelling speed of a head that exits the laser beam is set to be relatively low. When the aim shift region R overlaps the stripe pattern L2, the travelling speed of the head is set to be relatively high. <P>COPYRIGHT: (C)2010,JPO&INPIT |
