| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a calculation method for calculating a light intensity distribution formed on an image plane of a projection optical system in a short period of time. <P>SOLUTION: The calculation method causes a computer to calculate the light intensity distribution formed on the image plane of the projection optical system when an original is lit using a lighting optical system and an image of a pattern of the original is projected on a substrate through the projection optical system. The method includes the steps of determining whether an effective light source formed on a pupil plane of the projection optical system is divided into a plurality of areas if the original is not arranged on an object plane of the projection optical system; dividing the effective light source into the plurality of areas when it is determined that the effective light source is divided into the plurality of areas; calculating, for each of the plurality of areas, the light intensity distribution formed on the image plane of the projection optical system; and synthesizing light intensity distributions of the plurality of respective areas together. <P>COPYRIGHT: (C)2010,JPO&INPIT |
