发明名称 METHOD OF FABRICATING AN OPTICAL ANALYSIS DEVICE COMPRISING A QUANTUM CASCADE LASER AND A QUANTUM DETECTOR
摘要 The invention relates to a method of fabricating an optical device for analysing a scene, comprising an emitter and a detector in the mid-infrared or far-infrared, characterized in that it comprises: the production of a stack of semiconductor layers grown epitaxially on the surface of a semiconductor substrate, certain layers of which are doped; the production of a first, quantum cascade laser emission device (L) emitting an analysis beam in the mid-infrared or far-infrared, from a first level called the emission level, into the stack of semiconductor layers; and the production of a second, quantum detector device (D) capable of detecting a beam backscattered by the scene to be analysed, at the same level in the stack as the emission level.
申请公布号 US2010029026(A1) 申请公布日期 2010.02.04
申请号 US20090533429 申请日期 2009.07.31
申请人 THALES 发明人 BERGER VINCENT;CARRAS MATHIEU
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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