| 发明名称 |
REACTIVE GAS DISTRIBUTOR, REACTIVE GAS TREATMENT SYSTEM, AND REACTIVE GAS TREATMENT METHOD |
| 摘要 |
A reactive gas distributor for a reactive gas treatment system is provided, comprising a housing, a reactive gas inlet provided at one side of the housing and fluidly connectable to a remote plasma source, and a plurality of reactive gas outlets at another side of the housing and arranged in a pattern.
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| 申请公布号 |
US2010025370(A1) |
申请公布日期 |
2010.02.04 |
| 申请号 |
US20080185663 |
申请日期 |
2008.08.04 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
DIEGUEZ-CAMPO MANUEL;LOPP ANDREAS;GERTMANN REINER |
| 分类号 |
C23F1/00;C23C16/513;C23F1/08 |
主分类号 |
C23F1/00 |
| 代理机构 |
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代理人 |
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