| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer lamp in which illuminance distribution is uniform, and light can be taken out efficiently even if an ultraviolet ray of a short wavelength is used in the excimer lamp on which a window for light emission is mounted on the end face of a tube. SOLUTION: In the excimer lamp in which discharge gas is sealed in the interior of a tubular light-emitting tube, a window part for taking out the light is equipped at one end face of the light-emitting tube, and a pair of electrodes formed so to be extending in the tubular axis direction on the side face of the light-emitting tube, an electrode non-forming region is formed where the electrode is not formed at the region in the vicinity of the end part on the window part side on the side face of the light-emitting tube. On the surface of the discharge space side of the light-emitting tube in the electrode non-forming region, an ultraviolet ray reflecting membrane is formed. COPYRIGHT: (C)2010,JPO&INPIT
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