THIN-FILM DEVICE, METHOD FOR MANUFACTURING THIN-FILM DEVICE, AND ELECTRONIC EQUIPMENT

摘要

<P>PROBLEM TO BE SOLVED: To provide technique for manufacturing a flexible thin-film device. Ž<P>SOLUTION: A method for manufacturing the thin-film device includes: forming a separation layer (11) on a substrate (10); forming a support layer (12) containing silicate mineral containing clay as a principal component and having a layered crystal structure on the separation layer; forming a thin-film body (14) on the support layer; applying an energy to the separation layer to reduce the adhesion between the separation layer and each of the substrate and support layer; and removing the substrate from the support layer and the thin-film body. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž