| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a planar shape measuring method for easily and accurately measuring the planar shape of a plate-shaped body, and to provide a measuring device used to perform the measuring method. Ž<P>SOLUTION: The planar shape measuring method measures the planar shape of a plate-shaped body moving relatively to three sensors arranged in one direction using the three sensors. The planar shape measuring method measures the edge shape of the plate-shaped body by measuring the position of an optional measurement point on an edge of the plate-shaped body sequentially with the three sensors, calculating an estimation position of the measurement point estimated to have been measured by the middle sensor from positions of the measurement point measured by the two sensors on the sides among the three sensors, determines a deviation between the estimation position and the position of the measurement point measured by the middle sensor as a visual field deviation of the middle sensor, and correcting the position of the measurement point measured by the middle sensor based on the visual field deviation. The measuring device performs the measuring method. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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