| 摘要 |
PROBLEM TO BE SOLVED: To provide an automatic focusing device capable of automatically obtaining a focusing position without stopping a device etc., even when focusing detection on an object having a level difference on a focusing surface is performed. SOLUTION: The automatic focusing device 1000 includes: an optical unit 2 having a light source 10, a fly-eye lens 40 having a plurality of lenses disposed at prescribed intervals and transmitting a light beam emitted by the light source 10, a liquid crystal shutter 30 disposed between the light source 10 and fly-eye lens 40, transmitting the light beam through only one lens among the plurality of lenses disposed in the fly-eye lens 40, and changing the one lens in order, and an objective 60 condensing the light beam transmitted through the fly-eye lens 40 on the object W; and a first detector 110, a second optical detector 120, etc., for performing focus detection of the optical unit 2. COPYRIGHT: (C)2010,JPO&INPIT |
