| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibrator having a small amount of characteristic vibration caused by a temperature change. <P>SOLUTION: A tuning fork type vibrator 1 has an odd number of three or more elastic arms 11, 12, 13 and a base 14 connected to each end of the elastic arms 11, 12, 13, and vibrates the elastic arms 11, 12, 13 in their front and rear directions while the adjacent elastic arms 11, 12, 13 are staggered. The elastic arms 11, 12, 13 include: a base material 18 formed of a silicon oxide film; and piezoelectric elements 15, 16, 17 comprising lower electrode films 15a, 16a, 17a, piezoelectric films 15b, 16b, 17b, and upper electrode films 15c, 16c, 17c formed on one surface of the base material 18. <P>COPYRIGHT: (C)2010,JPO&INPIT |
