| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve anti-plasma properties of an aluminum nitride sintered compact. <P>SOLUTION: A densified aluminum nitride sintered compact is made by the method having a process S1 of forming a raw material mixture by mixing an aluminum-containing raw material which contains a hydrolyzable aluminum compound, a carbon-containing material and water, a process S2 of carbonizing and nitridation-reducing a precursor contained in the raw material mixture mixed in the process S1, a process S3 of dispersing a sintering additive in aluminum nitride powder obtained by carbonization and nitridation-reduction treatment in the process S2, and a process S4 of forming the aluminum nitride powder in which the sintering additive is dispersed into a product shape and then firing. <P>COPYRIGHT: (C)2010,JPO&INPIT |
