SCHEDULE GENERATING METHOD FOR SUBSTRATE PROCESSING APPARATUS, AND PROGRAM THEREOF

摘要

PROBLEM TO BE SOLVED: To prevent the availability of an apparatus from decreasing by determining whether use of a resource is extended and thus preventing a process from being stopped owing to a schedule.

SOLUTION: A control unit 25 adds a virtual end mark indicating use end time of a virtual resource of a warm water unit HDIW in timing to discharging of a lot from a processing stage using the warm water unit HDIW in a schedule for a single batch. When a whole schedule is generated, the virtual end mark of the virtual resource is put backward in terms of time if the discharging is delayed in terms of time to postpone the use of the virtual resource up to the virtual end mark. Consequently, a schedule for a single batch which is arranged thereafter is excluded by the virtual resource of the warm water unit HDIW. A process is prevented from being stopped as an alarm is generated owing to conflict for a resource, and the availability of the apparatus is prevented from decreasing.

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