发明名称 VACUUM HEATING DEVICE AND VACUUM HEATING TREATMENT METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a vacuum heating device and a vacuum heating treatment method having a simple configuration and enabling opening of a vacuum tank to the atmosphere in a short time by effectively cooling a heating furnace. <P>SOLUTION: The vacuum heating device 1 includes the vacuum tank 10; an air exhaust means 20 enabling air exhaust of the inner part 10a of the vacuum tank 10 to the vacuum atmosphere; the heating furnace 31 provided in the inner part 10a of the vacuum tank 10 and storing a treated object W; a heating means 33 for heating the treated object W stored in the heating furnace 31; and an air sending means 50 for blowing inert gas G toward the heating furnace 31. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010025406(A) 申请公布日期 2010.02.04
申请号 JP20080185951 申请日期 2008.07.17
申请人 SINFONIA TECHNOLOGY CO LTD 发明人 KOBAYASHI TOMOHARU;NISHIKAWA HIROKI;TADOKORO MASAHIRO
分类号 F27D7/02;F27B14/08;F27B14/20;F27D7/06;F27D9/00;F27D11/06;F27D17/00;F27D19/00 主分类号 F27D7/02
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