| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a protective film formation apparatus, by which a region of a workpiece to be coated with a protective film can be precisely coated with a protective film. <P>SOLUTION: The protective film formation apparatus for coating a predetermined coating region of a surface of a workpiece with a liquid resin comprises a workpiece holding means, a spraying means for spraying the liquid resin in the form of fine particles over the workpiece held by the workpiece holding means, a processing and sending means for causing relative movement of the spraying means and the workpiece holding means, workpiece sending position detection means for detecting the relative positional relationship between the spraying means and the workpiece holding means that are moved relative to each other by the workpiece sending means, and a control means for controlling the spraying means based on detection signals from the workpiece sending position detection means, wherein the control means comprises a memory for storing a coordinate map on which coating regions of the surface of the workpiece are defined and controls the spraying means based on the coating regions defined on the coordinate map stored in the memory and detection signals from the workpiece sending position detection means. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
