| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To attain machining of high accuracy in which apexes of square pyramids are aligned as a whole not depending on accuracy of a machine. <P>SOLUTION: A cutting tool is relatively fed relative to a workpiece in a first direction, and machining for creating a first V groove extending in the first direction on a surface of the workpiece is repeated. The first V groove is machined at a predetermined pitch, the cutting tool is moved along the first V groove, and the first V groove is scanned by a distance sensor. A distance to a groove bottom of the first V groove is measured, and waviness of the groove bottom of the first V groove along the first direction is detected. Based on the detection result of the waviness, while correcting a position of the cutting tool at respective machining positions of a second V groove, the cutting tool is relatively fed relative to the workpiece in a second direction perpendicular to the first direction, machining for creating the second V groove on the surface of the workpiece is repeated, and the second V groove is machined at a predetermined pitch. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
