| 摘要 |
PROBLEM TO BE SOLVED: To prevent particles from entering a work piece carrying container in a process of adjusting a pressure in a load lock chamber to prevent contamination of a work piece surface in a vacuum carrier carrying the work piece such as a reticle in a vacuum. SOLUTION: A mechanism 8 for pressing down the work piece carrying container 7 is provided in the load lock chamber 2 for the work piece container 7 containing the work piece W and freely opening/closing vertically. In the process of adjusting the pressure in the load lock chamber 2, an upper lid 71 of the work piece carrying container 7 is pressed down by the container pressing down mechanism 8 to fully closely adhere a seal material 73 to the lid to prevent the particle from entering the work piece carrying container 7. COPYRIGHT: (C)2010,JPO&INPIT |
