| 摘要 |
PROBLEM TO BE SOLVED: To achieve high intensity X-ray microbeams at nanometer levels. SOLUTION: An X-ray condensing lens has a structure of a guided wave route where the upside and bottom of a carbon layer 3 with a refractive index at N<SB>1</SB>are squeezed by ruthenium layers 2 and 4 with a refractive index at N<SB>2</SB>, and includes an X-ray phase shifter layer 5 with a refractive index at N<SB>3</SB>formed in a part of the carbon layer 3 and an X-lay shielding layer 6 with a refractive index at N<SB>2</SB>or higher which is formed in a part on the surface of the upper ruthenium layer 4. The phase shifter layer 5 is placed in a domain between the position of Y<SB>n</SB>(Q/P) and the position Y<SB>n</SB>((Q-1)/P) when the wavelength of X rays, the focal length and the distance along the AY direction from the center of an X-ray beam are taken asλ, f and Y<SB>n</SB>(Q/P)=änλf+2λf(Q/P-1)}<SP>1/2</SP>(n is an even number and P and Q are integral numbers satisfying 1≤Q≤P) , respectively, and the length t(Q/P) of the X-ray phase shifter layer 5 is t(Q/P)=(Q-1)×λ/äP×(N<SB>3</SB>-N<SB>1</SB>)}. COPYRIGHT: (C)2010,JPO&INPIT |
