HEATING, DECOMPRESSING AND DRYING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a heating, decompressing and drying device preventing moisture condensation and reducing fluctuation of a drying condition with time. SOLUTION: The heating, decompressing and drying device includes a lower heating means arranged below an object to be dried and heating the object to be dried from the lower side; an upper heating means arranged above the object to be dried and heating the object to be dried from the upper side; a chamber for storing the lower heating means and upper heating means; a decompressing means for decompressing inside of the chamber; and a chamber heating means for heating the chamber. COPYRIGHT: (C)2010,JPO&INPIT