| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent an pressure sensor from lowering in accuracy in consequence of thermal expansion, and also to provide the pressure sensor superior in mass productivity. Ž<P>SOLUTION: The pressure sensor (100) includes: a crystal oscillator (90) comprising a crystal oscillating piece (21), a quartz frame (20) having an outer frame for surrounding the crystal oscillating piece, a quarts lid (10) which siloxane bonds with one plane of the outer frame, and quarts base (30) which siloxane bonds with another plane of the outer frame; a memory section (60) which stores a relation between an oscillating frequency of the crystal oscillating piece (21) and an ambient pressure of the crystal oscillator; and a frequency measuring section (50) which measures an oscillating frequency. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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