| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection object acceptor capable of preventing reverse flow of waste liquid from a waste liquid storage part to an inspection part, and an inspection device equipped with the inspection object acceptor. Ž<P>SOLUTION: A space part 29 which is a space having an area of the square of the width of the inspection part 27 is provided as a reverse flow prevention structure from the waste liquid storage part 31 to the inspection part 27, downstream of the inspection part 27 of an inspection pattern constitution part 20 of the inspection object acceptor. No projection is provided in the space part 29. Since the space part 29 has a sufficient area, liquid meniscus is formed on the upside of a projection on the downstream side of the space part 29, to thereby prevent back flow of the waste liquid. Consequently, measurement accuracy of the inspection part 27 can be improved. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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