| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion generation device that can grasp a situation of the generation of ions generated by a flat-electrode type ion generation element, and a neutralization apparatus equipped with the ion generation device. SOLUTION: The ion generation device includes: a dielectric material; ion generation elements 11, 12 composed of an ion generation electrode and an induction electrode formed on their surfaces via the dielectric material; and current detecting electrodes 27a, 27b that are disposed along the ion generation electrode in the vicinity of the ion generation elements 11, 12 and detect a discharge current by absorbing the ions generated from the ion generation electrode. COPYRIGHT: (C)2010,JPO&INPIT
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