发明名称 METHOD OF MANUFACTURING IMAGE SENSOR
摘要 Embodiments relate to a method of manufacturing an image sensor which includes forming a plurality of lower layers over a semiconductor substrate. A first passivation layer may be formed over the lower layers to protect the lower layers. The first passivation layer may be formed in a pixel region and a peripheral region with different thicknesses. A spin-on-glass (SOG) layer may be formed over the first passivation layer. A second passivation layer may be formed over the SOG layer. Array etching may be used to form a concave area in the semiconductor substrate. A plurality of micro lenses may be formed over the bottom surface of the concave area.
申请公布号 US2010024979(A1) 申请公布日期 2010.02.04
申请号 US20090578159 申请日期 2009.10.13
申请人 BANG SUN-KYUNG 发明人 BANG SUN-KYUNG
分类号 C23F1/08 主分类号 C23F1/08
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