Optical element i.e. mirror, supporting device for fusion of silicon layer on substrate, has elastic units formed as monopods, and optical element and area elongated in square-shaped manner with preset aspect ratio

摘要

The device (10) has elastic units formed as monopods and bendable around axes standing perpendicular to each other. An optical element (26) i.e. mirror (32a), and an area illuminated by the optical element are elongated in a square-shaped manner with an aspect ratio of more than 4:1. The optical element is arranged in such a manner that it is closed in three axis directions of a cartesian coordinate system. One of the axes does not run parallel to one of the axis directions, and runs transverse to the axis direction.