| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a function capable of deciding relation between a value on a screen and a setting item of a recipe under execution. Ž<P>SOLUTION: A substrate processing device 1 includes a control part which executes the recipe constituted by a plurality of steps to perform a predetermined process on a substrate, and an operation part displaying a monitor value of a control item in each of the steps. The device displays setting available/unavailable information of the control item while using different colors, together with the monitor value of the control item in each step. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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