| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor testing apparatus and a calibration technique of the semiconductor testing apparatus, correcting accidental errors due to dispersion of properties of a print circuit board and waveform distortion so as to make timing calibration at high speed. Ž<P>SOLUTION: The semiconductor testing apparatus, which outputs a drive signal to each terminal of DUT from each of a plurality of drivers, is equipped with: a reference calibrating section, a sub-reference pin timing-calibrated by the reference calibrating section; a route selecting section connecting the reference calibrating section or either of a plurality of drivers other than the sub-reference pin with the sub-reference pin; a correction data memorizing section memorizing preliminarily correction data; and a timing controlling section where, after making the connection of the route selecting section to be switched and the timing of sub-reference pin to calibrate by the reference calibrating section, the timing of drive signal outputted from the drivers, is calibrated by sub-reference pin to correct the calibrated data obtained from those calibration with the correcting data from the correction data memorizing section. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
