| 摘要 |
PROBLEM TO BE SOLVED: To provide a position recognition device for accurately recognizing the position of a substrate in response to an image signal of an imaging camera having imaged the substrate. SOLUTION: This position recognition device images the substrate that is conveyed and temporarily positioned by the conveying means and recognizes its position. The position recognition device comprises a light source 8 for illuminating the substrate, a distance detection sensor 9 for detecting the distance to a part to be measured of the substrate illuminated by the light source, an imaging camera 7 for imaging the part to be measured of the substrate, and a controller 11 that sets the illumination level by the light source based on the detection by the distance detection sensor and, when the set illumination level is not appropriate, resets the illumination level by the light source based on the brightness of the image of the part to be measured of the substrate imaged by the imaging camera. COPYRIGHT: (C)2010,JPO&INPIT
|
