| 摘要 |
PROBLEM TO BE SOLVED: To provide a force sensor chip capable of reliably eliminating a difference in detection sensitivity. SOLUTION: The force sensor includes a force sensor chip 2, and a buffer device 4 that suppresses an outer force and applies it to the force sensor chip 2. The buffer device 4 includes an input section 10 for receiving an outer force, a sensor fixing section 13 for fixing a support section 5 of the force sensor chip 2, an attenuation mechanism section 3 for attenuating the outer force, and a transmitting section 11 for transmitting the force obtained by attenuating the outer force to an acting section 6 of the force sensor chip 2. The attenuation mechanism 3 is constituted such that at least a plurality of through-holes 25 or ring-shaped grooves 26 formed at a portion around the input section 10 from the surface side are arranged in a plurality of rows toward the outside of the input section 10. COPYRIGHT: (C)2010,JPO&INPIT
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