| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing an organic thin film for a semiconductor device that efficiently obtains the organic thin film of high quality, and a method for manufacturing the organic thin film for the semiconductor device using the apparatus. SOLUTION: The apparatus for manufacturing the organic thin film for the semiconductor device forms the organic thin film by laminating at least one monomolecular layer formed of an organic molecule on a surface of a substrate 30 to be filmed through a chemical bonding. The apparatus includes a substrate stage 311 for holding the substrate 30 to be filmed, a means 33 of introducing a fluid containing the organic molecule into the apparatus, a means 322 of removing by-products produced when the chemical bond is formed from the apparatus, and a means 34 of discharging the fluid from the apparatus. COPYRIGHT: (C)2010,JPO&INPIT
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