SYSTEM AND METHOD FOR MANUFACTURING THIN FILM ELECTRICAL DEVICES
摘要
<p>A system for manufacturing a thin film electrical device is provided in accordance with an exemplary embodiment. The system includes a chamber and a gas gate. The chamber includes accumulating apparatus therein configured for gathering a portion of the substrate within the chamber. The gas gate provides fluid communication between a pressure region of the chamber and a second pressure region.</p>
申请公布号
WO2010014058(A1)
申请公布日期
2010.02.04
申请号
WO2008US09182
申请日期
2008.07.30
申请人
UNITED SOLAR OVONIC LLC;CANNELLA, VINCENT;UZONI, GEORGE;DOTTER, BUDDIE