| 摘要 |
PROBLEM TO BE SOLVED: To decrease operations to attach a centering means to a container body and a cover body, and to make a liquid such as cleaning water hardly remain at the centering means. SOLUTION: A substrate storage container has the container body 2 which has an opening 3 and stores a precise substrate W, the cover body 4 which has a fitting case 21 to be fitted to the opening 3 and closes the opening 3, and the centering means of centering the container body 2 and cover body 4. The centering means includes a plurality of contact members 12 which are formed integrally with the opening 3 to be exposed from the opening 3 at respective corner parts of the opening 3, and a plurality of projections 25 which are formed at positions of the fitting case 21 corresponding to the respective contact members 12. Then the projections 25 and contact members 12 are made of different materials. COPYRIGHT: (C)2010,JPO&INPIT |
