| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aligner, an exposure system, an exposing method and a device manufacturing method, more flexibly coping with information of an earthquake. <P>SOLUTION: The aligner performs processing relating to exposure using a substrate and includes a control device for selecting at least one of first processing for controlling a processing state of the device and second processing different from the first processing to be performed based on the information of the earthquake. <P>COPYRIGHT: (C)2010,JPO&INPIT |
