| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent the occurrence of abnormal discharge by optimizing a transmission path of microwaves, using a radial line slot antenna. <P>SOLUTION: In the microwave plasma processing apparatus 10, the microwaves are transmitted using a space demarcated by a rectangular waveguide 305, a coaxial converter 310, an inner conductor 315, an outer conductor 340, a taper-shaped connector 320, and the radial line slot antenna 205. When the microwaves are propagated inside a wave retardation plate 205a covered with a metal film 205b using thermal spraying, a microwave current flows through an interface of the metal film 205b in the antenna. A gap G between the rectangular waveguide 305 and the coaxial converter 310 is managed so as to be within a range of (k±n)mm (n≤0.1) relative to a predetermined reference gap kmm (k≥0.3) by a fitting structure F. <P>COPYRIGHT: (C)2010,JPO&INPIT |
