| 摘要 |
PROBLEM TO BE SOLVED: To provide a susceptor wherein the distance between an inside surface of a wafer mounting part and a peripheral edge of a wafer is set constant regardless of the difference of tapering of the wafer when abutting parts formed in a circumferential part of the wafer mounting part abut on the wafer while preventing occurrence of sticking between the wafer and the susceptor. SOLUTION: This application uses this susceptor having, on its upper surface, a circular recessed wafer mounting part 7 for mounting a semiconductor wafer 8 thereon, wherein three or more abutting parts 9 formed to abut on the circumferential part of the semiconductor wafer 8 mounted on the wafer mounting part 7 while substantially coming into point contact therewith or line contact therewith along a line extending in the depth direction of the wafer mounting part 7 are formed along the circumferential part of the wafer mounting part 7; at least one of the abutting part 9 is included in each of two regions divided by an optional diameter of the wafer mounting part 7 when viewing the wafer mounting part 7 in a plan view; the height of the abutting part 9 is 1/2-1 times as much as the thickness of the semiconductor wafer 8. COPYRIGHT: (C)2010,JPO&INPIT |
