发明名称 BONDING FILM, DICING-DIEBONDING TAPE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an bonding film suppressing bending of a bonded semiconductor chip in the case where the chip is thin and has a large plane area. SOLUTION: The adhesive film 3 is used for bonding a semiconductor chip 4 having a thickness of 50 &mu;m or smaller and a plane area of 50 mm<SP>2</SP>or larger to a substrate 2, wherein the bonding film contains an epoxy resin of a 100 weight part, a curing agent of a 20 to 70 weight part, and a fumed silica particle of a 5 to 30 weight part, and the lowest melt viscosity in the temperature range of 70 to 120&deg;C is in the range of 2,500 to 10,000 Pa s. COPYRIGHT: (C)2010,JPO&amp;INPIT
申请公布号 JP2010028087(A) 申请公布日期 2010.02.04
申请号 JP20090068086 申请日期 2009.03.19
申请人 SEKISUI CHEM CO LTD 发明人 NAKAYAMA ATSUSHI;ISHIZAWA HIDEAKI;HAYAKAWA AKINOBU
分类号 H01L21/301;H01L21/52 主分类号 H01L21/301
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