发明名称 METHOD OF MANUFACTURING SUBSTRATE SUITABLE FOR DEVICE CONTAINING ORGANIC MATERIAL, AND METHOD OF MANUFACTURING DEVICE CONTAINING ORGANIC MATERIAL
摘要 <P>PROBLEM TO BE SOLVED: To provide a substrate the handling of which is easy and which is suitable for the construction of a device containing an organic material that makes use of functions of the organic material, including a molecular device. Ž<P>SOLUTION: The substrate has a semiconductor surface onto which hydrogen atoms and amino groups are chemisorbed. The amino group is fixed by, for example, Si-N bond. The amino group can react chemically with a number of functional groups and is excellent in the affinity with biomolecules. Its surface is also easy to handle in the atmosphere. If the amino group and the organic molecule are reacted chemically, the organic molecule and the semiconductor surface are chemically bonded integrally. The amino group can be introduced by causing, for example, a reactive species including nitrogen, such as ammonia, to come into contact with the semiconductor surface terminated by the hydrogen atoms and causing the amino group including the nitrogen atoms originating from the reactive species to be chemisorbed onto the semiconductor surface. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010028124(A) 申请公布日期 2010.02.04
申请号 JP20090184113 申请日期 2009.08.07
申请人 JAPAN SCIENCE & TECHNOLOGY AGENCY 发明人 MURATA HIDEYUKI
分类号 H01L21/363;C23C16/02;C30B23/08;C30B29/58;C30B30/00;H01L51/05;H01L51/40 主分类号 H01L21/363
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