| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a magnetic recording medium without losing a substrate surface having a magnetic recording layer by ion milling and without being affected by the air. SOLUTION: A magnetic recording medium manufacturing system 10 for manufacturing the magnetic recording medium by implanting an ion beam onto the substrate having the magnetic recording layer and then ashing to remove the substrate surface having the magnetic recording layer after the ion beam implantation comprises an ion beam implanting chamber 20 for implanting the ion beam onto the substrate having the magnetic recording layer on which a resist film or metal mask is applied, an ashing chamber 30 for ashing by plasma and removing the resist film or metal mask on the substrate having the magnetic recording layer on which the resist film or metal mask is applied, and a substrate conveyer 60 for conveying the substrate after the ion beam implantation from the ion implanting chamber 20 to the ashing chamber 30 when the ion implanting chamber 20 is connected with the ashing chamber 30 in a vacuum. COPYRIGHT: (C)2010,JPO&INPIT |
