发明名称 |
CLOSED LOOP CONTROLLER AND METHOD FOR FAST SCANNING PROBE MICROSCOPY |
摘要 |
A method of operating a metrology instrument includes generating relative motion between a probe and a sample at a scan frequency using an actuator. The method also includes detecting motion of the actuator using a position sensor that exhibits noise in the detected motion, and controlling the position of the actuator using a feedback loop and a feed forward algorithm. In this embodiment, the controlling step attenuates noise in the actuator position compared to noise exhibited by the position sensor in a bandwidth of about seven times the scan frequency. Scan frequencies up to a third of the first scanner resonance frequency or greater than 300 Hz are possible. |
申请公布号 |
EP2149030(A2) |
申请公布日期 |
2010.02.03 |
申请号 |
EP20080827958 |
申请日期 |
2008.05.02 |
申请人 |
VEECO INSTRUMENTS INC. |
发明人 |
SHI, JIAN;SU, CHANMIN;PRATER, CRAIG;MA, JI |
分类号 |
G01Q10/06 |
主分类号 |
G01Q10/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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