| 摘要 |
The arrangement has a vacuum chamber (100) and a vacuum pump (102), which has a rotatable rotor (106) arranged in a housing (104). The pump includes a flange (108) connected with the housing. A retaining element (120) is formed such that the flange is protected against the movement provided perpendicular to a flange plane by rotation of the rotor. The retaining element has a ring (122) connected with the vacuum chamber, and a stopper (124). The retaining element connects the flange and a chamber flange in a form fit manner. |
