| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate transfer apparatus that eliminates a possibility of transfer trouble. Ž<P>SOLUTION: A guide plate 7 of the substrate transfer apparatus has a plurality of floating gas ejecting holes 8 to 8. Namely, 128 circular gas ejecting holes 8 to 8 in total are formed on an upper surface of the guide plate 7 such that eight gas ejecting holes are in each array in a direction orthogonal to a transfer direction and 16 arrays are provided in a direction parallel to the transfer direction. One plate-like tray 5 is mounted on a guide plate 7 in a processed object carrying-out chamber 2. The tray 5 has a rectangular body portion 5a having both edges made parallel to the transfer direction, and six projection portions 5b, 5b, 5c, 5c, 5d, 5d in total, provided partially protruding outward from both the edges of the body portion 5a respectively, that an arm 24 for transfer engage in contact and disengage when the tray 5 is transferred by the arm 24 for transfer. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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