PLASMA-RESISTANT CERAMIC COATED SUBSTRATE

摘要

PURPOSE: A plasma-resistant ceramic coated substrate is provided to make a pore less than 1% without a spraying coating method. CONSTITUTION: A coated material(10) comprises aluminum, stainless, and quartz or ceramic material. The coated material is an inner wall of a chamber, a gas dispersion plate, a static chuck, a shower head, and a cylinder. A ceramic coating film(20) comprises an oxideyttrium film or an oxide aluminum film. The ceramic coating film has the surface roughness of 0.1~3. The ceramic coating film has a cohesive property of 75~90 Mpa about the coated material.