发明名称 InP based heterojunction bipolar transistors with emitter-up and emitter-down profiles on a common wafer
摘要 A wafer comprising at least one emitter-up Heterojunction Bipolar Transistor (HBT) and at least one emitter-down HBT on a common InP based semiconductor wafer. Isolation and N-type implants into the device layers differentiate an emitter-down HBT from an emitter-up HBT. The method for preparing a device comprises forming identical layers for all HBTs and performing ion implantation to differentiate an emitter-down HBT from an emitter-up HBT.
申请公布号 US7655529(B1) 申请公布日期 2010.02.02
申请号 US20050052935 申请日期 2005.02.07
申请人 HRL LABORATORIES, LLC 发明人 CHEN MARY;SOKOLICH MARKO
分类号 H01L21/331 主分类号 H01L21/331
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