发明名称 |
Spherical aberration corrected electrostatic lens, input lens, electron spectrometer, photoemission electron microscope and measuring system |
摘要 |
A mesh (M) having an ellipsoid shape or a shape close to the ellipsoid shape is attached to an electrode (EL1) among electrodes (EL1 to ELn). Voltages of the later-stage electrodes (EL2 to ELn) are appropriately set. With this arrangement, a local negative spherical aberration generated by the mesh (M) is cancelled out with a positive spherical aberration. This optimizes an electric field distribution. As a result, this realizes an electrostatic lens whose acceptance angle is extended to about ±60°.
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申请公布号 |
US7655923(B2) |
申请公布日期 |
2010.02.02 |
申请号 |
US20040631296 |
申请日期 |
2004.11.09 |
申请人 |
NATIONAL UNIVERSITY CORPORATION NARA INSTITUTE OFSCIENCE AND TECHNOLOGY;JEOL, LTD. |
发明人 |
DAIMON HIROSHI;MATSUDA HIROYUKI;KATO MAKOTO;KUDO MASATO |
分类号 |
G21K1/08;H01J3/14;H01J3/26;H01J49/42 |
主分类号 |
G21K1/08 |
代理机构 |
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代理人 |
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主权项 |
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