| 摘要 |
PURPOSE: An apparatus for loading a wafer on a susceptor is provided to allow a user to use the device for long time by preventing the damage due to stress concentration and increasing durability. CONSTITUTION: An up-down plate(30) is installed inside a processing chamber and is liftable. The main body unit(51) is arranged to one direction. A head unit(52) has larger a cross section than the main body unit and is formed on the top of the main body unit. A plurality of lift pins(50) are installed along with the peripheral direction of the up-down plate. An extension unit(53) has larger cross sections than that of the main body. A plurality of mounting groove portions(39) are installed along with the peripheral direction of the up-down plate. The lift pin is inserted into the mounting groove portion.
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