发明名称 |
Storage node including diffusion barrier layer, phase change memory device having the same and methods of manufacturing the same |
摘要 |
A phase change memory device and a method of manufacturing the phase change memory device are provided. The phase change memory device may include a switching element and a storage node connected to the switching element, wherein the storage node includes a bottom electrode and a top electrode, a phase change layer interposed between the bottom electrode and the top electrode, and a titanium-tellurium (Ti-Te)-based diffusion barrier layer interposed between the top electrode and the phase change layer. The Ti-Te based diffusion barrier layer may be a TixTe1-x layer wherein x may be greater than 0 and less than 0.5.
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申请公布号 |
US7655940(B2) |
申请公布日期 |
2010.02.02 |
申请号 |
US20070984763 |
申请日期 |
2007.11.21 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
PARK JONG-BONG;SHIN WOONG-CHUL;LEE JANG-HO |
分类号 |
H01L29/02 |
主分类号 |
H01L29/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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