发明名称 |
Detecting defects by three-way die-to-die comparison with false majority determination |
摘要 |
A method of determining defects in a plurality of images having essentially the same image contents is disclosed. A comparison operation is carried out once three fully comparable images having essentially the same image contents are present in the intermediate memory. The stored individual images are accessed randomly. A paired comparison operation between the three difference images is carried out.
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申请公布号 |
US7657077(B2) |
申请公布日期 |
2010.02.02 |
申请号 |
US20060364103 |
申请日期 |
2006.02.28 |
申请人 |
VISTEC SEMICONDUCTOR SYSTEMS GMBH |
发明人 |
MICHELSSON DETLEF;GERLACH STEFFEN;JUNGMANN BERND |
分类号 |
G06K9/00;G01N21/00;H01L21/66 |
主分类号 |
G06K9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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