发明名称 Detecting defects by three-way die-to-die comparison with false majority determination
摘要 A method of determining defects in a plurality of images having essentially the same image contents is disclosed. A comparison operation is carried out once three fully comparable images having essentially the same image contents are present in the intermediate memory. The stored individual images are accessed randomly. A paired comparison operation between the three difference images is carried out.
申请公布号 US7657077(B2) 申请公布日期 2010.02.02
申请号 US20060364103 申请日期 2006.02.28
申请人 VISTEC SEMICONDUCTOR SYSTEMS GMBH 发明人 MICHELSSON DETLEF;GERLACH STEFFEN;JUNGMANN BERND
分类号 G06K9/00;G01N21/00;H01L21/66 主分类号 G06K9/00
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