发明名称 THIN LAYER HAVING GRADIENT OF COMPOSITIONS AND FABRICATING METHOD THEREOF
摘要 <p>PURPOSE: A thin film with a gradient of a material composition is provided to control surface energy of a thin film by ensuring a gradient of a film core material composition, to have no defects at the interface, and to secure interlayer adhesion power. CONSTITUTION: A thin film comprises two kinds or more of materials selected from the group consisting of at least one organic material and an organic/inorganic hybrid material; and a first layer(2) which has a gradient of a material composition in a width direction of the film and is thinned by a sol-gel method. The thin film additionally includes a second layer(3) on a first layer and the second layer comprises at least two kinds of inorganic materials.</p>
申请公布号 KR20100010726(A) 申请公布日期 2010.02.02
申请号 KR20080071730 申请日期 2008.07.23
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, KWANG HEE;BULLIARD XAVIER;PARK, JONG JIN;CHOI, YUN HYUK
分类号 C08J5/18;H01L21/20 主分类号 C08J5/18
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